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Remote Review Station
Dealing Quickly With Process Excursions to Maximize Yields
Orbotech's advanced Remote Review Station (RRS) dramatically improves the review and verification process of detecting defect images remotely and offline and facilitates defect, repeat, glass and lot judgment. RRS is equipped with a sophisticated user interface for reviewing defects and performing judgment.
Highlights:
  • Allows offline or online defect review and classification
  • Carries out Lot/Glass/Defect judgment
  • Is equipped with a sophisticated user interface for reviewing defects
Benefits:
  • Images and defect information reviewed by the operator either inside or outside the clean room
  • Saves purchasing dedicated review stations
  • Smaller footprint saves clean room space and expenses
  • No need to transfer glasses review
  • Shorter review cycle time:
      • No cassette transportation from AOI/Tester to R/S
      • No glass load/unload time on R/S
      • No alignment and stage motion on R/S
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